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采用金属有机化合物的化学气相淀积法 ,以 β-二酮螯合物为源物质 ,在多孔 Al2 O3 衬底上成功制备了超薄钯钇合金膜 .用 Pd( Ac Ac) 2 +Y( Ac Ac) 3 混合源制备的钯钇合金膜的晶粒尺寸 ( 2 1nm× 10 nm )比单独用 Pd( Ac Ac) 2 制备的钯膜的尺寸 ( 3 0 nm× 10 nm )小 . XPS研究发现 ,制备的 Pd-Y合金膜中 Y/Pd比小于源物质的 .氢的透气性实验表明 ,合金膜的氢渗透率高于 Pd膜 ,且在 2 0 0～ 3 5 0℃范围内渗透率稳定 .
An ultra-thin palladium-yttrium alloy film was successfully prepared on a porous Al 2 O 3 substrate by chemical vapor deposition of metal-organic compounds and β-diketone chelate as a source material. Pd (Ac Ac) 2 + Y (2 1 nm × 10 nm) was smaller than the size of palladium membrane prepared with Pd (Ac Ac) 2 alone (30 nm × 10 nm). The XPS study It was found that the Y / Pd ratio of the prepared Pd-Y alloy film is less than that of the source material. The hydrogen permeability test shows that the hydrogen permeability of the alloy film is higher than that of the Pd film and penetrates in the range of 200 ~ 350 ℃ Rate stable.