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应用光热辐射（photothermalradiometry－PTR）和光学束反射（opticalbeamdeflection－OBD）的方法研究了靶材中La系混合稀土元素加入量对CuNiSi溅射薄膜热性能的影响。靶材中La系混合稀土元素的加入引起被溅射薄膜热行为的差异，随着靶材中La系稀土元素加入量的提高，被溅射的CuNiSi薄膜的热扩散系数α也增加。薄膜电性能测量结果表明，随着靶材熔炼过程中稀土元素加入量的提高，薄膜的电阻车和电阻温度系数降低，薄膜电阻率的变化趋势与PTR和OBD的实验结果相一致。
The effect of La-based mixed rare earth elements on the thermal properties of CuNiSi thin films was investigated by photothermalradiometry-PTR and optical beam reflection-OBD. The addition of La-based mixed rare earth elements in the target caused the difference in the thermal behavior of the sputtered films. As the addition of La-based rare earth elements in the target increased, the thermal diffusivity α of the sputtered CuNiSi films also increased. The measurement results of the electrical properties of the films show that the resistivity and the temperature coefficient of resistance of the films decrease with the increase of rare earth elements during the smelting process. The change trend of the film resistivity is consistent with the experimental results of PTR and OBD.