用激波管方法研究了氟原子亲电动力学.利用反射激波加热获得离子化气体,随后经冷却速度达106K/s的强稀疏波冷却,离化气体将经历以电子复合为主的非平衡过程.用Langmuir静电探针监测反射激波后离子浓度随时间的演变,分析了探针工作状态,引入了探针鞘层内的弹性散射修正.测定了温度在1200～2200K以氩气为碰撞第三体的F原子与电子复合速率系数,讨论了温度依赖关系. Electrokinetic kinetics of fluorine atoms was studied by shock tube method. The ionized gas was obtained by heating with a reflection shock and then cooled by a strong sparse wave with a cooling rate of 106 K / s. The dissociated gas will undergo a non-equilibrium Process.Using Langmuir electrostatic probe to monitor the evolution of ion concentration over time after the reflected shock wave, the working state of the probe was analyzed, and the elastic scattering correction in the probe sheath was introduced.It was measured that the temperature was between 1200 ~ 2200K, The third body of the F atom and electron recombination rate coefficient, discusses the temperature dependence.