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针对微加工工艺引起的微机械梳齿谐振器可靠性问题进行了仿真分析。包括:深反应离子刻蚀工艺造成梳齿与弹性支撑梁侧壁倾斜对驱动力、谐振频率和谐振次数的影响;残余应力和杂质不均等因素在弹性支撑梁上产生的微裂纹对谐振器动力学的影响。仿真结果表明:当梳齿与弹性支撑梁的侧壁向内倾斜时,驱动力、谐振频率与倾斜角成反比;向外倾斜时,驱动力、谐振频率与倾斜角成正比;谐振频率与微裂纹的个数成反比;两者均会导致谐振次数(寿命)降低。
Aiming at the reliability of micromachined comb resonator caused by micromachining process, the simulation analysis is carried out. Including: the influence of the tilting of the comb teeth and the sidewall of the elastic supporting beam on the driving force, the resonance frequency and the resonance frequency due to the deep reactive ion etching process; the micro-cracks generated on the elastic supporting beam due to residual stress and impurity unevenness, The impact of learning. The simulation results show that the driving force and the resonant frequency are inversely proportional to the tilt angle when the comb teeth and the sidewall of the elastic support beam are inwardly inclined. The driving force and resonant frequency are proportional to the tilt angle when tilted outward. The number of cracks is inversely proportional; both lead to a decrease in the number of resonances (lifetime).