上海市测试技术研究所传感器考察组最近对日本传感器的公司、大学与研究所等16个单位进行参观与考察后,谈到了传感器的新的进展。 在九州工大参观了液体混合法生长陶瓷薄膜工艺技术,并用它来做薄膜传感器;在东京大学看到了用半导体集成技术研制成功的利用压电效应将电信号转换成各种微位移,振动与旋转的传感器;利用光纤技术和薄膜 Shanghai Institute of Testing Technology sensor inspection team recently Japan’s sensor companies, universities and research institutes, such as 16 units visited and inspected, talked about the sensor’s new progress. Kyushu Polytechnic University visited the liquid mixed growth of ceramic film technology, and use it as a thin film sensor; seen at the University of Tokyo semiconductor integrated technology developed by the use of piezoelectric effect to convert electrical signals into a variety of micro-displacement, vibration and rotation Sensor; using fiber optic technology and film