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This paper reports that (Ga, Mn)N is prepared using implantation of 3at.% Mn Ions into undoped GaN. Structural characterization of the crystals was performed using x-ray diffraction(XRD). Detailed XRD measurements have revealed the characteristic of Mn-ion implanted GaN with a small contribution of other compounds. With Raman spectroscopy measurements, the spectra corresponding to the intrinsic GaN layers demonstrate three Raman active excitations at 747, 733 and 566 cm-1 identified as E1(LO), A1(LO) and E2H , respectively. The Mn-doped GaN layers exhibit additional excitations at 182, 288, 650-725, 363, 506 cm-1 and the vicinity of E2H mode. The modes observed at 182, 288, 650-725 cm-1 are assigned to macroscopic disorder or vacancy-related defects caused by Mn-ion implantation. Other new phonon modes are assigned to Mnx-Ny, Gax-Mny modes and the local vibrational mode of Mn atoms in the (Ga, Mn)N, which are in fair agreement with the standard theoretical results.
Structural characterization of the crystals was performed using x-ray diffraction (XRD). Detailed XRD measurements have revealed the characteristic of Mn- With Raman spectroscopy measurements, the spectra corresponding to the intrinsic GaN layers demonstrate three Raman active excitations at 747, 733 and 566 cm-1 identified as E1 (LO), A1 (LO) and E2H, respectively. The Mn-doped GaN layers exhibit additional excitations at 182, 288, 650-725, 363, 506 cm-1 and the vicinity of E2H mode. The modes observed at 182, 288, 650-725 cm- assigned to macroscopic disorder or vacancy-related defects caused by Mn-ion implantation. Other new phonon modes are assigned to Mnx-Ny, Gax-Mny modes and the local vibrational mode of Mn atoms in the (Ga, Mn) N, which are in fair agreement with the standard theory results.