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对氮化铝陶瓷基片的热导率进行了实验和理论分析.实验发现,初始氧含量低的氮化铝粉体烧结后得到的最大热导率较高,加入较多的Y2O3作烧结助剂才能获得最大热导率;随着氧含量的增加,可达到的最大热导率逐渐降低,而需加入的Y2O3量减少.同时,晶间相的存在对热导率有重要影响.根据氧杂质对热导率的影响,首先推导出缺陷散射截面与热导率的关系,随后根据AlN陶瓷的主要晶间相Y3Al5O12,推导出热导率与氧含量、晶间相和添加助剂的定量关系式.按模型对具有不同氧含量样品的热导率变化趋势进行计算的曲线与实验值符合较好.“,”The experiments and theoretical analysis on the thermal conductivity of AlN cera mic substrate are carried out.All the results prove the following viewpoints:the maximum thermal conductivity of AlN with a lower oxygen concentration is higher and the thermal conductivity decreases with the increase of oxygen concentratio n in AlN ceramic;Y2O3 acting as a sintering additive should be mixed mor e into the AlN powder with a lower oxygen concentration.Secondary phases affect th e thermal conductivity of AlN significantly.The quantitative relationship betwee n the thermal conductivity and oxygen,Y2O3 is developed.