【摘 要】
：
采用旁热式烧结工艺制成了酞菁铜NO_2气敏元件.该元件的灵敏度比较高,在低浓度范围内线性较好,可检测浓度为5ppm的NO_2;响应速度快(小于25s),有极高的选择性,对其它气体基本
【机 构】
：
吉林大学电子科学系,吉林大学电子科学系,吉林大学电子科学系 长春 130023,长春 130023,长春 130023
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采用旁热式烧结工艺制成了酞菁铜NO_2气敏元件.该元件的灵敏度比较高,在低浓度范围内线性较好,可检测浓度为5ppm的NO_2;响应速度快(小于25s),有极高的选择性,对其它气体基本不响应,且具有一定的抗湿性.
The side-fired sintering process was used to make copper phthalocyanine NO 2 gas sensor, which has high sensitivity and good linearity in low concentration range and can detect NO 2 with a concentration of 5 ppm. The response speed is faster (less than 25 seconds) High selectivity, basically does not respond to other gases, and has some moisture resistance.
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