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光学薄膜损伤阈值是衡量光学薄膜抗激光损伤能力的重要参数,而要实现损伤阈值的测试必须先实现薄膜损伤的判识。利用光声频谱特性研究单层氧化硅薄膜在不同激光能量下的损伤情况,简要地分析了声频法判别薄膜损伤的可行性,建立了激光致薄膜产生的声波采集系统,比较和分析薄膜损伤前后的24~40kHz高频段曲线,提取频率特征,并提出利用曲线相似函数进行薄膜损伤的识别。实验数据结果表明,该方法简单易行,可实现在线检测,又能准确判别薄膜损伤。
Optical thin film damage threshold is an important parameter to measure the anti-laser damage ability of optical thin film. To realize the threshold of damage threshold, the identification of thin-film damage must be realized first. The damage of monolayer silicon oxide film under different laser energy was studied by using the photoacoustic spectrum characteristics. The feasibility of using acoustic method to discriminate the film damage was analyzed briefly. The acoustic acquisition system of laser induced thin film was established. Frequency band from 24 kHz to 40 kHz, the frequency characteristics were extracted and the similarity function of the curve was used to identify the damage of the film. The experimental results show that this method is simple and easy to implement, which can detect on-line and accurately determine the film damage.