采用超声氯分子束和时间分辨质谱研究了由１０６４ｎｍ近红外激光诱导ＩｎＰ（１００）表面蚀刻反应的产物质量分，入射Ｃｌ＿２分子束的平动能效应，激光能量密度和表面温度的影响，并讨论了反应机理。 The effects of the product mass fraction, the translational energy effect of incident Cl_2 molecular beam, laser energy density and surface temperature on the InP (100) surface etching reaction induced by 1064nm near-infrared laser were studied by ultrasonic molecular beam and time-resolved mass spectrometry. Reaction mechanism.