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为了解决多自由度微机械陀螺结构设计中存在的参数耦合问题,提出了一种基于增益和带宽最优化的参数设定方法。为了从结构设计和参数限定的角度提高单轴微机械振动陀螺的性能指标,分析了多自由度单轴微机械振动陀螺的参数对于陀螺性能的影响。为了抑制低频环境噪声对于输出信号的影响,陀螺的驱动需要在高频率范围内进行操作。通过理论推演得到在高操作频率下陀螺结构设计中广泛存在于峰值间隔频率、操作频率、阻尼与陀螺性能之间相互制约的内在关系。结合其设计原则,设计出的微机械陀螺带宽为200 Hz、增益提高了5 dB,能满足绝大多数工程应用的要求。
In order to solve the problem of parametric coupling in the design of multi-degree-of-freedom MEMS gyroscope, a parameter setting method based on gain and bandwidth optimization is proposed. In order to improve the performance of single-axis micro-mechanical vibrating gyroscope from the perspective of structural design and parameter definition, the influence of multi-degree-of-freedom single-axis micro-mechanical vibrating gyroscope parameters on gyroscopic performance is analyzed. In order to suppress the effects of low-frequency ambient noise on the output signal, the gyro driver needs to operate in the high frequency range. Through the theoretical deduction, the inherent relationship between the peak spacing frequency, operating frequency, damping and gyroscopic performance in the design of gyroscope at high operating frequency is obtained. In combination with its design principle, the designed gyroscope bandwidth is 200 Hz and the gain is improved by 5 dB, which can meet the requirements of most engineering applications.