大陡度透镜表面膜层折射率均匀性分析

来源 :中国激光 | 被引量 : 0次 | 上传用户：oyfj2009

【摘要】

：

集成电路与光刻机系统中通常会设计并使用很多小曲率半径的大陡度透镜,以实现大数值孔径,这对镀制于其表面的紫外薄膜的性能提出了很高的要求.本文分析了行星夹具转动过程中大陡度凸透镜从中心到边缘位置的薄膜沉积角度的变化规律,研究了 MgF2膜层的折射率随沉积角度的变化规律,明确了大陡度凸透镜从中心到边缘位置的膜层折射率不均匀性对深紫外增透膜的影响.针对小曲率半径大陡度凸透镜表面的膜层沉积特性,通过升高基底温度提高了折射率分布的均匀性,为大陡度透镜膜层折射率不均匀性修正提供了理论和实验依据.

【作者】

：

张伟丽冯操孙建朱瑞王建国沈雪峰易葵朱美萍邵建达

【机构】

：

中国科学院上海光学精密机械研究所薄膜光学实验室,上海201800;中国科学院上海光学精密机械研究所强激光材料重点实验室,上海201800;中国科学院上海光学精密机械研究所薄膜光学实验室,上海20180

【出处】

：

中国激光

【发表日期】

：

2021年9期

【关键词】

：

薄膜深紫外光学薄膜大陡度透镜折射率均匀性沉积角度

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大陡度透镜表面膜层折射率均匀性分析

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