据美国 Physics Today,1999,52:9报道,美国劳伦斯伯克利国家实验室的科学家蒙蒂罗(O.Monteiro),成功地在集成电路上沉积了铜导线,这有利于集成电路的更加小型化和低能耗化。集成电路中成千上万的晶体管是通过导线连接的,而这些导线是在预先刻蚀好的槽中沉积金属铝得到的。与铝相比,铜的优点是更低的电阻率,这使导线更精细化,进而使集成电路更小型化。然而,在技术上存在两个难题。第一,在长 According to the U.S. Physics Today, 1999, 52: 9, O. Monteteiro, a scientist at Lawrence Berkeley National Laboratory successfully deposited copper wires on integrated circuits, which is conducive to the miniaturization of integrated circuits Low energy consumption. Thousands of transistors in integrated circuits are connected by wires, which are deposited in pre-etched trenches. Copper has the advantage of lower resistivity compared to aluminum, which leads to finer leads, which in turn leads to smaller integrated circuits. However, there are two technical problems. First, in the long