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本文通过在ＰＨＩ５９５型扫描俄歇多探针和ＰＨＩ３５００型二次离子质谱仪联合谱仪中所做的大量实验结果，论述了这类装置在材料表层的杂质分析、化合物分析及深度剖面分析等方面所显示的特点和问题．
In this paper, a large number of experimental results in the PHI595 Scanning Auger probe and the PHI3500 type secondary ion mass spectrometer combined spectrometer were discussed in this article on the material surface impurity analysis, compound analysis and depth profile analysis Features and problems shown.