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在分析硅微机械角速度传感器稳定工作条件的基础上，探讨了微机械角速度传感器对驱动电路的控制要求，提出了一种新颖的驱动频率自动跟踪的控制方法，给出了驱动电路闭环控制框图，详细分析了驱动模态闭环控制逻辑。最后的开、闭环对比实验说明了本控制方案的有效性。
Based on the analysis of stable working conditions of silicon micromachined angular velocity sensor, the control requirements of micro-mechanical angular velocity sensor for driving circuit are discussed. A novel control method of automatic tracking of driving frequency is proposed. The closed-loop control block diagram of driving circuit is given, The driving mode closed-loop control logic is analyzed in detail. The final open and closed-loop comparative experiments illustrate the effectiveness of this control scheme.