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提出制作连续微光学元件的一种新技术———液晶实时掩膜技术 ,阐述了其基本原理和制作方法。基于部分相干光成像理论 ,采用计算机模拟了用实时掩膜制作微透镜和微轴锥镜阵列的过程。同时建立了实验装置进行实验 ,用全色银盐干板 (Kodak 131)通过酶刻蚀得到口径为 118.7μm ,深为 1.32 2 μm的 5 6× 48的轴锥镜的列阵。
A new technique of making continuous micro-optical elements, a real-time LCD mask technology, is presented. The basic principle and method of fabrication are described. Based on the partially coherent light imaging theory, the process of making micro-lens and micro-axicon array with real-time mask was simulated by computer. At the same time, an experimental device was set up to conduct experiments. An array of 5 6 × 48 axicon mirrors with a diameter of 118.7 μm and a depth of 1.32 2 μm was obtained by enzymatic etching using a full-color silver salt dry plate (Kodak 131).