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本文将介绍高速旋转平面反射镜镜面变形测量。平面反射镜在高速旋转时由于镜体倾斜引起的惯性力矩会使镜体产生弯曲变形,影响成像质量。利用应变电测法,通过导电滑环把镜体旋转时镜面应变片电阻变化信号连接到应变仪。从变形与应变之间的关系,用仿真方法估计镜体等效厚度,数值积分重构镜体弯曲变形。并与有限元计算结果进行对比,验证测量的正确性。研究表明:该方法有效可行,为旋转镜面变形测量提供一种新的思路。
This article will introduce high-speed rotating plane mirror mirror surface deformation measurement. Plane mirror rotating at high speed due to the mirror body inertia moment will cause the mirror body bending deformation, affecting the imaging quality. Strain gauges are used to connect the strain gauge resistance change signal through the conductive slip ring when the lens is rotated. From the relationship between deformation and strain, the equivalent thickness of the mirror body is estimated by the simulation method, and the numerical integral reconstruction is used to reconstruct the bending deformation of the lens. And compared with the results of finite element analysis to verify the correctness of the measurement. The research shows that this method is effective and feasible, and provides a new idea for the measurement of rotating mirror deformation.