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３．真空阀门的设计（上接１９９９年第５期第４８页）真空阀门是真空系统的重要元件。对于构成管路一部分的阀门，其流导大小是一个重要的性能参数。对于主要用来起开关气路作用的阀门，阀板关闭的密封性能也是重要的性能参数之一。密封性能是用其漏气率来衡量的。对于主要用
3. Vacuum valve design (on the 5th of 1999 No. 48) vacuum valve is an important component of the vacuum system. The size of the conductance of a valve that forms part of a pipe is an important performance parameter. For valves that operate primarily as a gas switch, the seal performance of the valve plate closure is also one of the key performance parameters. The sealing performance is measured by its leak rate. For the main use