【摘 要】
：
一、引言 自从1965年12月英国剑桥科学仪器公司生产出第一台商品扫描电镜以来,至今虽只有17年,但可以说,其发展速度极快,现在已相当普及。各种型号的扫描电镜不断涌现,它们
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一、引言 自从1965年12月英国剑桥科学仪器公司生产出第一台商品扫描电镜以来,至今虽只有17年,但可以说,其发展速度极快,现在已相当普及。各种型号的扫描电镜不断涌现,它们的各项性能指标不断有所提高,功能不断扩大,设计和制造日臻完善。
I. INTRODUCTION Although only 17 years since the first commercial scanning electron microscope was produced by Cambridge Scientific Instruments in December 1965, it can be said that its development has been extremely rapid and is now quite widespread. Various types of scanning electron microscopy continue to emerge, their continuous improvement of various performance indicators, functions continue to expand, design and manufacture improved.
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