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采用多弧离子镀技术在W18Cr4V高速钢表面沉积TiC薄膜,通过场发射电镜、能谱及X射线衍射研究了薄膜表面及界面的结构与组成,并利用微量磨损仪对TiC薄膜的耐磨性进行了对比。结果表明,多弧离子镀在高速钢表面获得的TiC薄膜硬度达2900HV0.05,薄膜表面平整致密,在TiC薄膜与基体之间存在一扩散并不明显的伪扩散层。由于TiC膜的硬度高于TiN膜且具有更低的摩擦系数,TiC膜的耐磨性优于TiN膜。
TiC thin films were deposited on W18Cr4V high speed steel by multi-arc ion plating technology. The structure and composition of the surface and interface of the films were studied by field emission electron microscopy, energy dispersive X-ray diffraction and X-ray diffraction. The wear resistance of TiC thin films Contrast. The results show that the hardness of TiC thin film obtained by multi-arc ion plating on high speed steel reaches 2900 HV0.05, the surface of the film is smooth and compact, and there is a diffusive and diffusive pseudo-diffusion layer between the TiC film and the substrate. Due to the hardness of the TiC film is higher than the TiN film and has a lower coefficient of friction, the wear resistance of the TiC film is better than that of the TiN film.