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光学均匀性是光学材料的重要指标,目前高精度的测量方法一般采用绝对测量法,而该方法步骤繁琐,容易受环境影响。根据波长移相干涉仪的移相特点,提出了测量光学材料光学均匀性的波长调谐两步绝对测量法。该方法在波长移相干涉仪中通过平行平板放入测量和空腔测量两个步骤得到平行平板的光学均匀性。在模拟仿真验证方法的正确性后,进行了实验研究,并与传统的绝对测量法的测量结果进行比较。结果表明,波长调谐两步绝对测量法可用于测量平行平板的光学均匀性,且测量步骤简单,精度较高。
Optical uniformity is an important indicator of optical materials, the current high-precision measurement methods commonly used absolute measurement method, and the method steps cumbersome and vulnerable to environmental impact. According to the phase shift characteristics of wavelength phase shift interferometer, a two-step wavelength tuning absolute measurement method for measuring the optical uniformity of optical materials is proposed. The method obtains the optical uniformity of the parallel plate through the two steps of the parallel plate insertion measurement and the cavity measurement in the wavelength phase-shifting interferometer. After the correctness of the simulation verification method, the experimental study was carried out and compared with the traditional absolute measurement method. The results show that wavelength tuning two-step absolute measurement can be used to measure the optical uniformity of parallel plates, and the measurement steps are simple and the accuracy is high.