近年来中科院上海冶金所围绕功能材料和器件开展了敏感材料和传感器的研究工作,并先后取得了一批成果。这些成果已分别通过了中国科学院、省、市及所级技术鉴定,大部份已转让到有关工厂生产。 1.蓝宝石上外延硅单晶膜(SOS)技术及其在传感器上的应用 In recent years, Shanghai Metallurgy Institute of Chinese Academy of Sciences has conducted research work on sensitive materials and sensors around functional materials and devices and has successively achieved a number of achievements. These achievements have passed the Chinese Academy of Sciences, provincial, municipal and level of technical appraisal, the majority have been transferred to the factory production. 1. Sapphire epitaxial silicon single crystal film (SOS) technology and its application in the sensor