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本文论述了薄膜应力快速测量系统中测温系统的设计原理及数据的处理方法，倒置了簿膜内应力与温度变化的关系曲线，从而计算出簿膜的热膨胀系数和复合弹性模量。
This paper discusses the design principle and data processing method of the temperature measurement system in the rapid measurement system of film stress, inverts the curve of the stress in the film and the temperature change, and calculates the thermal expansion coefficient and the composite elastic modulus of the film.