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以Al_2O_3陶瓷为研究对象,开展了低压水射流激光复合多道切割的试验研究。通过试验,对比分析了水射流激光复合单道切割技术与水射流激光复合多道切割技术的优劣;通过改变首刀激光参数,研究不同首刀切割深度对Al_2O_3陶瓷基板的切割质量影响。试验结果表明,相较而言,低压水射流激光复合多道切割技术可以明显提高切割质量;在合理的首刀切割深度下,切缝内熔渣残留较少,切槽形貌规则,锥度基本保持在0.12以下。
Taking Al_2O_3 ceramics as the research object, the experimental research of low pressure water jet laser multi-path cutting was carried out. Through the experiment, the advantages and disadvantages of water jet laser single track cutting technology and water jet laser multi-track cutting technology are compared and analyzed. The cutting quality of Al_2O_3 ceramic substrate is studied by changing the cutting head laser parameters. The experimental results show that, compared with the low pressure water jet laser multi-pass cutting technology can significantly improve the cutting quality; at a reasonable cutting depth of the first knife, less residual slits, slitting morphology, basic taper Keep below 0.12.