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在频域内利用微观轮廓功率谱密度和反射光栅模型得出:基片表面微观形貌在空间波长0.37～0.895μm范围内的谐波分量是造成反射镜散射的主要因素,据此指出加工工艺改进方向应为降低该空间波长范围内的谐波分量。选取沥青抛光和化学机械抛光的试件,表面粗糙度值近似相同,二维功率谱密度曲线在空间波长0.3μm附近出现交叉,空间波长0.37～0.895μm范围内,化学机械抛光试件比沥青抛光试件表面谐波分量弱。基片镀膜后,化学机械抛光的试件散射值小,实验结果与理论分析一致。
In the frequency domain, using the micro-profile power spectral density and the reflection grating model, it is concluded that the harmonic components of the micro-morphology of the substrate surface in the spatial wavelength range of 0.37 ~ 0.895μm are the main factors causing the scattering of the mirror, The direction should be to reduce the harmonic components in the spatial wavelength range. The surface roughness values of the samples with pitch polishing and chemical mechanical polishing were approximately the same. The two-dimensional power spectral density curves crossed at the spatial wavelength of 0.3 μm and the spatial wavelength ranged from 0.37 to 0.895 μm. The chemical mechanical polishing samples were polished more than the asphalt The surface harmonic component of the specimen is weak. After the substrate coating, chemical mechanical polishing specimen scattering value is small, the experimental results consistent with the theoretical analysis.