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对采用 MEMS开关的 E类放大器进行了原型仿真 ,并且通过工艺流片制作 MEMS开关 ,搭建 E类放大器电路进行测试 .测试结果显示 ,这种机械式的放大器同样能实现有源放大器的功能 .测试得到的放大器实际效率与原型模拟结果一致 ,而放大器的功率增益高达 2 0 0 0 .
The E-type amplifier with MEMS switch was prototyped, and the MEMS switch was made through the process flow to build the E-type amplifier circuit for testing.The test results show that this kind of mechanical amplifier can also realize the function of the active amplifier. The resulting amplifier’s actual efficiency is consistent with the prototype simulation, while the amplifier’s power gain is as high as 2000.