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本文针对目前常规清洗无法完成的分划板和光栅等精密光学元件的清洗,简单介绍了激光清洗的基本原理和优点,并介绍了常用的四种激光清洗方法,为激光清洗精密光学元件工艺做技术储备。
In this paper, the basic principles and advantages of laser cleaning are briefly introduced according to the cleaning of precision optical components such as reticle and grating, which can not be done by routine cleaning. The four commonly used methods of laser cleaning are introduced. Technical reserve.