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导模共振滤波器由于其高峰值反射率,低旁带反射,窄带以及带宽可控等优良特性引起了人们极大的关注,采用亚波长光栅的导模共振效应可以实现传统基于高低折射率介质的多层膜滤波器所无法实现的特殊功能,在弱调制模式下,其共振带宽可以被压缩到零点几纳米,但是由于介质表面和空气层的菲涅耳反射,使得偏离或者远离共振区时的反射率偏高,根据等效介质理论,亚波长光栅在远离共振区可以被看为均匀的薄膜,本文通过对导模共振光栅进行单层、双层以及三层抗反射设计,有效的降低了导模共振光栅的旁带反射率,从而在可见光波段获得了性能优良的共振滤波器.
The guided-mode resonance filter attracts great attention due to its excellent characteristics such as high peak reflectivity, low sideband reflection, narrowband and controllable bandwidth. The guided-mode resonance effect of subwavelength grating can realize the traditional high refractive index medium Of the multilayer filter can not achieve the special function, in the weak modulation mode, the resonant bandwidth can be compressed to zero a few nanometers, but due to the medium surface and the air layer Fresnel reflection, making the deviation from or away from the resonance zone According to the theory of equivalent medium, the sub-wavelength grating can be seen as a uniform film away from the resonance region. In this paper, single, double and triple antireflection design of the guided-mode resonant grating is effectively reduced The guided mode resonant grating sideband reflectivity, which in the visible band obtained excellent performance of the resonant filter.