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本文研究了以钛片为基底的TiO_2多晶薄膜电极的制备条件。发现在钛片热氧化和TiO_2膜的还原时,在气流中添加少量的水蒸气可解决TiO_2膜与基底结合不良的问题。制备了不同膜厚的光敏电极,研究了膜厚和光电流的关系。用热导法观察了氢气气氛下还原TiO_2的现象,研究了半导体化温度对光电流的影响。用制得的电极在日光下分解水制氢,能量转换效率为1.2％。
In this paper, the preparation conditions of TiO 2 polycrystalline thin film electrode based on titanium plate are studied. It was found that adding a small amount of water vapor into the gas stream can solve the problem of poor bonding between the TiO 2 film and the substrate during the thermal oxidation of the titanium film and the reduction of the TiO 2 film. Photosensitive electrodes with different thickness were prepared and the relationship between the film thickness and photocurrent was studied. The phenomenon of reduction of TiO_2 under hydrogen atmosphere was observed by thermal conductivity method, and the influence of semiconductor temperature on photocurrent was also studied. The resulting electrode was used to decompose water to produce hydrogen in sunlight, with an energy conversion efficiency of 1.2%.