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在对静电激励硅微机械谐振真空传感器研究的基础上，实现了一种新型的粘滞型谐振真空计。并给出了理论分析和实验结果。测试表明，其有效量程为1～1．33×103Pa。
Based on the research of electromechanical silicon micro-mechanical resonance vacuum sensor, a new type of viscous resonance vacuum gauge is realized. The theoretical analysis and experimental results are given. Test showed that the effective range of 1 ~ 1.33 × 103Pa.