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针对光刻机掩模台与工件台在曝光扫描过程中必须保持运动同步的问题,提出了一种迭代学习同步控制方法.为提高系统的动态跟踪精度和带宽,采用以直线电机和音圈电机为执行器的宏微控制结构,建立了掩模台的动力学模型.提出的主从同步控制结构以工件台为主动系统、掩模台为从动系统,在常规反馈控制的基础上加入了同步控制器.根据迭代学习控制方法设计了二阶同步学习律,并证明了该学习律的收敛性.仿真结果表明同步学习算法可以明显地减小同步偏差,同步偏差的峰值和移动标准差随迭代次数的增加而不断减小,在50次迭代后分别减小了45.12%和36.84%.
Aiming at the problem that the lithography machine mask table and the workpiece table must be kept in motion during the exposure scanning process, an iterative learning synchronization control method is proposed.In order to improve the dynamic tracking precision and the bandwidth of the system, a linear motor and a voice coil motor are used Actuator macro-micro control structure, established a dynamic model of the mask table.The proposed master-slave synchronous control structure with the workpiece table as the active system, the mask table as the driven system, based on the conventional feedback control added synchronization Controller. According to the iterative learning control method, the second order synchronization learning law is designed and the convergence of the learning law is proved. The simulation results show that the synchronization learning algorithm can significantly reduce the synchronization deviation, The decrease of the number of iterations decreased by 45.12% and 36.84% respectively after 50 iterations.