美国普渡大学工程师的研究表明，利用激光可能避免和确定尘埃污染物，帮助计算机芯片制造商大幅节约成本。由E.Dan Hirleman领导的小组已能测定尘埃的化学成份，他们使用称作“散射计”的新仪器，通过测量激光的散射来探测尘埃微粒。研究人员还在开发一种新型、更精确的深紫外 Purdue University engineers have shown that the use of lasers can avoid and identify dust contaminants and help computer chip makers achieve substantial cost savings. A team led by E. Dan Hirleman has been able to determine the chemical composition of dust by using new instruments called “scatterometers” to detect dust particles by measuring the laser’s scattering. Researchers are also developing a new, more accurate deep UV