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5. Effect of annealing temperature on the microstructure and optoelectrical properties of ZnO thin film

Effect of annealing temperature on the microstructure and optoelectrical properties of ZnO thin film

来源 :矿物冶金与材料学报:英文版 | 被引量 : 0次 | 上传用户：xiezuoyaoxiezuoyao

【摘 要】

：

This paper reports a piezoelectric nanogenerator(NG) with a thickness of approximately 80 μm for miniaturized self-powered acceleration sensors. To deposit the

【作 者】

：

Xiao-zhou Zhang Yan-ping Xia X 

【机 构】

：

SchoolofPhysics&,MaterialsScience

【出 处】

：

矿物冶金与材料学报:英文版

【发表日期】

：

2019年9期

【关键词】

：

piezoelectric ZnO thin film RF MAGNETRON SPUTTERING ANNEALING temperature ACCELE 

【基金项目】

：

the National Natural Science Foundation of China (No. 61671017),Key Project of Excellent Youth Talent Support Program in Colleges and Universities of Anhui Province (No. gxyqZD2018004),Provincial Natu

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This paper reports a piezoelectric nanogenerator(NG) with a thickness of approximately 80 μm for miniaturized self-powered acceleration sensors. To deposit the piezoelectric zinc oxide(ZnO) thin film, a magnetron sputtering machine was used. Polymethyl me

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