硅压阻测速探头采用微型探针结构,以硅压阻器件作为压力敏感元件制成测速探头。它的尺寸小,具有良好的静、动态特性,可测量水流平均流速和脉动流速。在低雷诺数的水流中,还可测得边界层内的水流紊动强度,是一种新型的一维动态流速测量仪器。该探头根据毕托管原理,将两根φ0.45毫米的不锈钢针管水平放置,相距0.8毫米,分别作为总压和静压探针,针管的另一端各装有一只φ3毫米的硅压阻器件,针管内 Silicon piezoresistive speed probe using micro-probe structure, silicon piezoresistive devices as a pressure-sensitive components made of speed probe. Its small size, with good static and dynamic properties, can measure the average flow velocity and pulsating flow velocity. In the low Reynolds number of water flow, but also measured in the boundary layer of the turbulent flow intensity, is a new type of one-dimensional dynamic flow measurement instruments. According to the principle of BiTor tube, the probe sets two stainless steel needle tubes of φ0.45 mm horizontally, with a distance of 0.8 mm, respectively, as a total pressure and static pressure probe, and the other end of the needle tube is equipped with a φ3 mm silicon piezoresistive device, Inside the needle