系统地研究了光学研磨过程中,磨料粒径、载荷大小以及机床转速对钕玻璃表面及亚表面损伤的影响。结果表明,机床转速和载荷基本不改变材料表面粗糙度,而较大载荷或较低机床转速产生较大的亚表面缺陷,表面粗糙度和亚表面缺陷缺陷深度基本与最大磨料粒径呈正比,载荷增倍使亚表面缺陷与表面粗糙度的常数比值增加0.05。研究结果为钕玻璃加工工艺改进提供了参考依据。 The effects of abrasive particle size, load size and machine speed on the surface and subsurface damage of neodymium glass were systematically studied. The results show that the machine speed and load basically do not change the surface roughness of the material, while the larger load or lower machine speed produce larger sub-surface defects, surface roughness and subsurface defect depth is basically proportional to the maximum abrasive particle size, The doubling of the load increases the constant ratio of sub-surface defects to surface roughness by 0.05. The results provide a reference for the improvement of Nd glass processing technology.