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考虑原子在基底表面的扩散、沿岛周界的扩散和不同层间的扩散以及非均匀基底上表面吸附能分布的各向异性,建立起非均匀基底表面上原子扩散和三维薄膜生长的动力学蒙特卡罗模型.模拟得到在不同生长条件下出现的层状生长、岛状生长和混合生长三种生长模式和相应的多层薄膜生长形貌图.通过统计三维薄膜中原子在各层的分布,计算薄膜的表面粗糙度,得到薄膜生长模式与生长条件之间的关系.
The kinetics of atomic diffusion and three-dimensional film growth on a non-uniform substrate surface is established considering the diffusion of atoms on the substrate surface, the diffusion along the island periphery, the diffusion between different layers, and the anisotropy of the distribution of adsorption energy on the surface of the non-uniform substrate Monte Carlo model.The three growth patterns of layered growth, island growth and mixed growth under different growth conditions and corresponding growth morphology of multi-layered thin films were simulated.The distribution of atoms in three-dimensional thin films , The surface roughness of the film is calculated, and the relationship between the film growth mode and the growth condition is obtained.