提出了一种新型楔形膜在真空中的制作方法,可以替代白光干涉位移传感器中的关键元件。该方法采用两层复制技术,用有机材料SU8胶作为楔形膜中间的材料。同时,搭建了白光干涉位移传感器系统,对制作的楔形膜进行了测量。实验结果表明,该解调系统具有较好的稳定性及较高的测量精度。 A new method of making wedge film in vacuum was proposed to replace the key components of white light interference displacement sensor. The method uses two layers of replication technology, organic material SU8 plastic as a wedge-shaped membrane in the middle of the material. At the same time, a white-light interference displacement sensor system was set up and the wedge film was measured. Experimental results show that the demodulation system has good stability and high measurement accuracy.