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谐振式微光学陀螺(RMOG)是利用光学Sagnac效应和微电子机械系统(MEMS)加工工艺实现的一种新型角速度惯性传感器。为了减小光学器件受温度、应力等外界环境变化的影响,提高陀螺性能,快速精确的频率跟踪与锁定技术是非常必要的。提出了两种应用于RMOG的频率跟踪与锁定方法:单路光路(单路模式)和两相向传输光路(双路共模模式);分析比较了两种方案应用于RMOG中所得到的陀螺性能。单路模式由于受光路非互易性噪声的影响较小,锁频精度高;双路共模模式频率跟踪速度快,动态响应性能好。对RMOG的测试表明,对应于单路模式和双路共模模式,分别可以得到0.07°/s的频率锁定精度和0.09 ms.[(°)/s]-1的频率跟踪速度。
Resonant Micro-Optics Gyro (RMOG) is a new type of angular velocity inertial sensor that utilizes the optical Sagnac effect and micro-electro-mechanical system (MEMS) machining process. In order to reduce the influence of external environment such as temperature and stress on optics, it is necessary to improve gyroscope performance, fast and accurate frequency tracking and locking technology. Two frequency tracking and locking methods are proposed for RMOG: single optical path (single mode) and two-phase transmission optical path (dual common mode); the gyroscopic performance of the two schemes is analyzed and compared . The single-mode mode has a high frequency-locked precision because of less influence of the nonreciprocal noise of the optical path, and has the advantages of fast tracking frequency and good dynamic response in the dual common-mode mode. Tests on the RMOG show that the frequency locking accuracy of 0.07 ° / s and the frequency tracking speed of 0.09 ms [] / s] -1 are obtained for the single mode and the dual common mode, respectively.