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介绍了计算机控制光学表面成型(CCOS) 技术的基本原理,对双旋转磨头的去除函数进行研究,研究了不同形状的磨头的去除函数特性,并在多次实验的基础上得到了最优的加工参数,在去除函数的基础上提出了模板函数的概念及算法。根据加工旋转对称非球面光学表面的特点,结合模板函数提出了一种基于同心圆磨头运动轨迹的控制算法。运用该算法对神光Ⅲ号打靶非球面透镜的一种工艺试样( Φ300m m ,F5-9 ,最大非球面度为46μm) 进行自动加工,面型精度达到1λ(RMS,λ= 632-8nm),取得了满意的结果。
The basic principle of computer controlled optical surface forming (CCOS) technology is introduced. The removal function of double rotary grinding head is studied. The removal functions of different shapes of grinding head are studied. Based on the experiments, The processing parameters, based on the removal of the function of the proposed template concept and algorithm. According to the processing characteristics of rotationally symmetric aspheric optical surface, combined with the template function, a control algorithm based on the trajectory of concentric grinding head is proposed. A kind of processing sample (Φ300m m, F5-9, the maximum asphericity is 46μm) of ShenGuang III target aspherical lens is automatically processed by this algorithm. The surface accuracy reaches 1λ (RMS, λ = 632-8nm ), And achieved satisfactory results.