论文部分内容阅读
采用真空磁过滤等离子电弧沉积的方法在 9Cr1 8钢上沉积不同厚度的 DLC膜。为了检测成膜质量 ,在较宽的载荷范围内分别使用显微硬度、纳米压痕和划痕技术表征 9Cr1 8钢和 DLC/9Cr1 8的机械和摩擦性能。结果显示 ,9Cr1 8和 DLC的纳米硬度和弹性模量分别为 8GPa、2 5 0 GPa和60 GPa、60 0 GPa,9Cr1 8、DLC和有机膜的摩擦系数分别为 0 .3 5、0 .2 0和 0 .1 3。纳米压痕和划痕技术能为 DLC/ 9Cr1 8提供丰富的近表面弹塑性变形和摩擦、磨损等信息。DLC/ 9Cr1 8的机械和摩擦性能的研究可以用来评估膜的承载和抗磨损性能。
A vacuum magnetic filtration plasma arc deposition method was used to deposit DLC films with different thicknesses on 9Cr18 steel. In order to test the film quality, the mechanical and tribological properties of 9Cr1 8 steel and DLC / 9Cr18 were characterized using microhardness, nano-indentation and scratching techniques respectively over a wide range of loadings. The results showed that the nano-hardness and elastic modulus of 9Cr1 8 and DLC were 8GPa, 250GPa and 60GPa, respectively. The friction coefficients of 60GPa, 9Cr18, DLC and organic films were 0.35,0.2 0 and 0 .1 3. Nanoindentation and scratching techniques provide DLC / 9Cr18 rich surface-to-surface elasto-plastic deformation and friction, wear and other information. DLC / 9Cr18 mechanical and tribological properties of the study can be used to evaluate the film bearing and anti-wear properties.