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介绍介质薄膜透射光谱的测量以及基于分析薄膜透射光谱的计算薄膜光学参数的方法。对制备在玻璃基板上的二氧化钛、二氧化硅和氧化锌薄膜进行了可见光谱区的透射比测量,并用包络线方法和最优化方法对这些透明薄膜的光学参数进行了计算和分析。着重讨论了最优化方法在分析薄膜光学参数中的应用及其误差分析。此外,还对包络线方法和最优化方法进行了比较。
The measurement of transmission spectra of dielectric thin films and the method of calculating the optical parameters of thin films based on the analysis of transmission spectra of thin films are introduced. The transmittance of visible spectrum of TiO2, SiO2 and ZnO thin films prepared on glass substrate was measured. The optical parameters of these transparent films were calculated and analyzed by the envelope method and optimization method. The application of the optimization method in analyzing the optical parameters of thin films and the error analysis are mainly discussed. In addition, the envelope method and the optimization method are compared.