本文将电子束曝光和X射线曝光技术相结合以制造X射线波段螺旋波带片。用电子束曝光和微电镀技术在镂空薄膜上制备母波带片X射线掩模版,用X射线曝光和微电镀技术小批量复制螺旋波带片。研制成可用于1.24nm波长的螺旋波带片,其最外环宽度为200nm,金吸收体厚度为700nm,占空比合理,侧壁陡直,结构优良。 In this paper, electron beam exposure and X-ray exposure technology combine to manufacture X-ray spiral band plate. The mastering X-ray mask is prepared on the hollowed-out film by electron beam lithography and micro-plating technology. The spiral banding film is reproduced in small batches by X-ray exposure and micro-plating technology. Developed into a spiral zone plate with a wavelength of 1.24nm, the outermost ring width is 200nm, the thickness of the gold absorber is 700nm, the duty cycle is reasonable, the side wall is steep and the structure is excellent.