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针对传统电子束物理气相沉积(EB-PVD)制备的柱状晶结构MCrAlY涂层存在线性缺陷的问题,本文建立了等离子体激活EB-PVD(PA EB-PVD)设备,并采用PA EB-PVD技术制备出了具有等轴晶结构的新型NiCoCrAlY涂层。结果表明,增大电弧放电电压和基板偏压均可以提高沉积粒子的能量。随着沉积粒子能量增强,涂层逐渐由柱状晶结构转变为致密等轴晶结构,晶粒尺寸增大;另一方面,涂层成份离析效应增强,主要体现在Al含量降低和Cr含量升高。
In order to solve the problem of the linear defects in the MCrAlY columnar columnar structure prepared by traditional electron beam physical vapor deposition (EB-PVD), a plasma-activated EB-PVD (PA EB-PVD) A novel NiCoCrAlY coating with equiaxed crystal structure was prepared. The results show that both the arc discharge voltage and substrate bias can increase the energy of deposited particles. With the increase of energy of deposited particles, the coating gradually changes from columnar crystal structure to dense equiaxed crystal structure, and the grain size increases. On the other hand, the segregation effect of coating composition is enhanced mainly by the decrease of Al content and the increase of Cr content .