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利用无机溶胶凝胶法制备出具有优良热致相变光学特性的VO2薄膜,通过改变制备过程中的条件,发现在一定的制备参数下,可得到光透射特性具有窗口形状的热致相变薄膜,该类薄膜相变前后在600~850nm范围出现显著透光度窗口状变化现象。利用XRD、XPS对相变光学特性具有窗口结构的薄膜和具有典型相变特性的薄膜进行对比分析,结果显示利用无机溶胶-凝胶法得到的薄膜表面没有衬底离子出现,衬底扩散离子主要存在于薄膜和衬底界面之间。通过对引起相变过程中光透射窗口状变化的原因进行讨论,得到薄膜在相变过程中出现透射光谱窗口状的变化是来源于V3+和衬底扩散离子Na+的共同作用。
VO2 thin films with excellent thermal induced phase change optical properties were prepared by inorganic sol-gel method. By changing the conditions during the preparation process, it was found that the thermal induced phase-change films with light transmission properties with window shape could be obtained under certain preparation parameters , This type of film before and after the phase transition appeared in the range of 600 ~ 850nm significant transmittance window-like changes. XRD and XPS were used to compare the films with phase-change optical properties and those with typical phase-change characteristics. The results showed that there was no substrate ions on the surface of the films obtained by inorganic sol-gel method. Exists between the film and the substrate interface. By discussing the reason of the light transmission window change during the phase transition, the window of the transmission spectrum appeared during the phase transformation is derived from the combination of V3 + and Na +.