日本科学技术厅无机材料研究所已研究成功一种高分辨率的电能损耗分光装置EELS。该装置同俄歇电子能谱仪及红外吸收仪一样,也是固体表面分析的有力手段。该装置的原理概要如下:在向固体表面照射低能电子束时,一些电子很容易散射在固体的表面原子上而失去能量。也就是说,这些照射电子的一部分能量已转换成固体表 Institute of Inorganic Materials Japan Science and Technology Agency has successfully studied a high-resolution power loss spectroscopy device EELS. The device, like Auger EDS and IR absorbers, is also a powerful tool for solid surface analysis. The principle of the device is summarized as follows: When a solid surface is irradiated with a low-energy electron beam, some electrons are easily scattered on the solid surface atoms and lose energy. That is, a portion of the energy of these irradiated electrons has been converted into a solid form