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本文介绍了一种高真空低温环境下用于薄膜光电性能研究的小型液氮低温恒温器,它能提供稳定低温并与外界隔绝的真空环境,可广泛用于薄膜材料的光学、磁热、超导和电学性能研究领域。系统通过液氮杜瓦和基片加热装置使样品维持在所需的低温高真空条件下,既能通过外接光源将光线引入真空室并辐照在样品上或通过真空电极引线测试样品的电学特性,也可实现薄膜的光电性能表征。热负荷计算与分析表明,该系统可长时间保持所需的低温真空环境,且该装置具有结构简单、体积小和温控稳定等优点,适于薄膜器件的真空低温变温研究。
In this paper, a small liquid nitrogen cryostat used in the research of thin-film optoelectronic properties under high vacuum and low temperature environment is introduced, which can provide a stable vacuum environment with low temperature and can be widely used in optical, magnetocaloric, ultra-thin Conducting and Electrical Properties Research Areas. The system uses liquid nitrogen Dewar and substrate heating to maintain the sample in the desired low temperature and high vacuum conditions, both by external light source to introduce light into the vacuum chamber and irradiated on the sample or through the vacuum electrode lead test sample electrical properties , But also can realize the photoelectric characterization of the film. The calculation and analysis of heat load show that the system can maintain the required low temperature vacuum environment for a long time, and the device has the advantages of simple structure, small volume, stable temperature control and the like, and is suitable for the research of the vacuum low temperature temperature change of the thin film device.