本文介绍应用离子束刻蚀技术减薄石英晶片,把石英晶体谐振器的基频提高到60～300MH_z。给出了基频及其泛音的动态参数。谐振器具有较小的等效电阻,一般为15～50欧姆(基频),较高的Q值,一般为20000～70000(基频),较好的频谱特性,正常的频率温度特性和良好的机械强度。 This article describes the application of ion beam etching thinning quartz wafer, the fundamental frequency of the quartz crystal resonator increased to 60 ~ 300MH_z. The dynamic parameters of the fundamental frequency and its harmonics are given. Resonators have a smaller equivalent resistance, typically 15 to 50 ohms (fundamental), higher Q values, typically 20000 to 70000 (fundamental), good spectral characteristics, normal frequency-temperature characteristics, and good Mechanical strength.