Silver foils and ion-implanted silver foils exposed to atomic oxygen (AO) generated in a ground simulation facility were investigated by the quartz crystal microbalance (QCM), the scanning electron microscopy (SEM) and the X-ray photoelectron spectroscopy (XPS). The experimental results show the presence of Ag2O and AgO in an oxidation process of the silver foil having exposure to AO. As soon as silver comes under the bombardment of atomic oxygen, the oxidation process starts with a thick film forming on the silver surface. Because of the development of stresses, the oxide layer gets cracked and spalled, which leads to appearance of a new silver surface intensifying further oxidation. At last, AgO begins to form on the outer surface of the oxide film. The analytical results of the XPS and the AES attest to formation of a continuous high-quality protective oxide-based layer on the surface of ion-implanted silver films after exposure to AO. This layer can well protect materials in question from erosion.