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在干涉检测中,常用各种调制手段将被测信息加载到干涉图中,通过对检测得到的条纹图样进行分析,便可以得到被测信息。如果实验条件不允许施加任何调制手段,探测器检测得到的将很有可能是具有闭合条纹的单幅干涉图。正则化相位跟随(RPT)技术可以对单幅闭合干涉图进行相位重构,但其最主要的问题是精度过低。从最小二乘法角度出发,在经典RPT技术基础上,利用黄金分割(GS)算法对干涉图相位进行二次逼近,实现了对单幅闭合干涉图的高精度相位重构。计算机仿真结果表明该算法在保持了经典RPT算法各项优点的同时能够有效提高相位重构精度。对实际干涉图进行处理的结果与ZYGOGPI干涉仪进行了对比,结果较吻合,平均峰-谷(PV)值精度优于λ/20。
In the interference detection, a variety of modulation methods are commonly used to load the measured information into the interferogram. By analyzing the detected stripe pattern, the measured information can be obtained. If the experimental conditions do not permit the application of any means of modulation, the detection of the detector will most likely be a single interferogram with closed fringes. The regularized phase-follow (RPT) technique can reconstruct a single closed interferogram, but the main problem is the low accuracy. Based on the classical RPT technique, the quadratic approximation of the interferogram phase is performed using the Golden Section (GS) algorithm from the perspective of the least square method, and a high-precision phase reconstruction of a single closed interferogram is achieved. Computer simulation results show that this algorithm can effectively improve the phase reconstruction accuracy while maintaining the advantages of classical RPT algorithm. The results of the actual interferogram are compared with that of the ZYGOGPI interferometer. The results are in good agreement with the average peak-to-valley (PV) accuracy better than λ / 20.