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用热灯丝电子辅助化学气相沉积的方法合成了金刚石膜.对所沉积的金刚石膜、天然金刚石、石墨进行了俄歇分析和特征电子能量损失分析.并与文献结果进行了比较.在俄歇谱中,所测量的能量范围内,可以看出这里有二个峰,且此二个主峰的间隔为13.2eV.在特征电子能量损失谱中,22.4eV 处的峰是对应于表面等离子振荡,而33eV 处的峰是相应于体内等离子振荡.分析表明所沉积的金刚石膜显示了很好的天然金刚石的化学结构.金刚石和石墨都是由碳元素构成的,但是他们的晶体结构和原子的化学状态是完全不同的.金刚石是由 C原子 Sp~3轨道杂化而构成的一种正四面体结构,而石墨是由 Sp~2轨道杂化而成的一种三角晶系,是一种平面的层状结构.这种结构上的差别意味着 C 原子的化学环境不同,因而其电子状态也不相同.在俄歇线型的变化下,即峰的位置,形状将会产生变化.其他包括峰的出现和消失,峰宽的变化和各峰的强度发生指出的变化等等.所以线型的变化也可作为一种“指纹”,以鉴定表面的化学状态.因为价带直接和原子的化学状态有关,故对不同结构的碳 KVV 价带俄歇线型的变化相当灵敏.特征电子能量损失谱,是指当电子从固体中逸出时,所经受的特殊能量损失,这些损失主要是指由逸出电子所激发的带间跃迁和各种等离子体振荡.这些损失与含碳物质结构的关系也相当灵敏,反映了它们的能带结构的细节,而且对低原子序原子特别有效,例如对 C 就是这样的.
The diamond films were synthesized by hot filament electron assisted chemical vapor deposition.The Auger analysis and characteristic electron energy loss analysis of the deposited diamond films, natural diamonds and graphite were carried out and compared with the literature results.At the same time, , It can be seen that there are two peaks in the measured energy range, and the interval between the two main peaks is 13.2 eV. In the characteristic electron energy loss spectrum, the peak at 22.4 eV corresponds to surface plasmon oscillation and The peak at 33eV corresponds to in vivo plasma oscillations.The analysis shows that the deposited diamond film shows a good natural diamond chemical structure Both diamond and graphite are made of carbon but their crystal structure and atomic chemical state Is completely different. Diamond is a tetrahedral structure composed of C atoms Sp ~ 3 orbital hybridization, and graphite is a triangular system formed by Sp ~ 2 orbital hybridization, is a planar Layered structure. This structural difference means that the chemical environment of C atoms are different, and thus their electronic states are not the same. In the Auger line type changes, the location of the peak, the shape will change. He includes the appearance and disappearance of peaks, the changes in peak width, and the indicated changes in the intensities of the peaks, etc. Therefore, linear variations can also be used as a “fingerprinting” to identify surface chemical states because valence bands are directly and Atomic chemical state, so it is quite sensitive to the changes in the valence band Auger lineage of different structures. The characteristic electron energy loss spectrum refers to the special energy loss experienced by the electrons as they escape from the solid. These losses Mainly refers to the band-gap transitions and various plasma oscillations excited by the escaping electrons.These losses are also quite sensitive to the carbonaceous material structure, reflecting the details of their band structure, but also for the low atomic number atoms For example, this is valid for C